JPH0249725Y2 - - Google Patents
Info
- Publication number
- JPH0249725Y2 JPH0249725Y2 JP4219886U JP4219886U JPH0249725Y2 JP H0249725 Y2 JPH0249725 Y2 JP H0249725Y2 JP 4219886 U JP4219886 U JP 4219886U JP 4219886 U JP4219886 U JP 4219886U JP H0249725 Y2 JPH0249725 Y2 JP H0249725Y2
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- semiconductor wafer
- carrier
- holding
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 86
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 235000012431 wafers Nutrition 0.000 description 79
- 230000002093 peripheral effect Effects 0.000 description 9
- 230000032258 transport Effects 0.000 description 7
- 239000011295 pitch Substances 0.000 description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 239000000969 carrier Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4219886U JPH0249725Y2 (en]) | 1986-03-22 | 1986-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4219886U JPH0249725Y2 (en]) | 1986-03-22 | 1986-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62154646U JPS62154646U (en]) | 1987-10-01 |
| JPH0249725Y2 true JPH0249725Y2 (en]) | 1990-12-27 |
Family
ID=30857883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4219886U Expired JPH0249725Y2 (en]) | 1986-03-22 | 1986-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249725Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0751517Y2 (ja) * | 1988-04-12 | 1995-11-22 | ローム株式会社 | リードフレーム用マガジン |
| JP2726317B2 (ja) * | 1989-10-26 | 1998-03-11 | 沖電気工業株式会社 | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
-
1986
- 1986-03-22 JP JP4219886U patent/JPH0249725Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62154646U (en]) | 1987-10-01 |
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